RELEASE AND TRANSFER OF LARGE-AREA ULTRA-THIN PDMS

被引：0

作者：

Gao, Jinsheng ^{[1
]}

Guo, Dongzhi ^{[2
]}

Santhanam, Suresh ^{[1
]}

Yu, YingJu ^{[2
]}

McGaughey, Alan J. H. ^{[2
]}

Yao, Shi-Chune ^{[2
]}

Fedder, Gary K. ^{[1
]}

机构：

[1] Carnegie Mellon Univ, Dept Elect & Comp Engn, Pittsburgh, PA 15213 USA

[2] Carnegie Mellon Univ, Dept Mech Engn, Pittsburgh, PA 15213 USA

来源：

2014 IEEE 27TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS) | 2014年

关键词：

PDMS transfer; diaphragm with electrode; electrocaloric cooling;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper reports on the fabrication of ultra-thin (similar to 10 mu m) polydimethylsiloxane (PDMS) films with embedded metal electrodes of 2 mu m minimum feature size, as well as the release and transfer of large area films (>5 cm). The initial motivation for this work is the development of a miniature pump actuator for moving working fluid in an electrocaloric microcooler. PDMS diaphragms with electrodes are released and transferred onto contoured silicon chambers formed by gray-scale lithography and deep-reactive ion etching.

引用

页码：544 / 547

页数：4

共 9 条

[1] Stretchable gold conductors embedded in PDMS and patterned by photolithography: fabrication and electromechanical characterization [J].

Adrega, T. ;

Lacour, S. P. .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2010, 20 (05)

[2]

Gao J., 2012, 37 GOMACTECH C LAS V

[3] Topographies of plasma-hardened surfaces of poly(dimethylsiloxane) [J].

Goerrn, Patrick ;

Wagner, Sigurd .

JOURNAL OF APPLIED PHYSICS, 2010, 108 (09)

[4]

Guo D., 2013, ASME 2013 SUMM HEAT

[5] Mechanisms of reversible stretchability of thin metal films on elastomeric substrates [J].

Lacour, Stephanie P. ;

Chan, Donald ;

Wagner, Sigurd ;

Li, Teng ;

Suo, Zhigang .

APPLIED PHYSICS LETTERS, 2006, 88 (20)

[6] CMOS-MEMS membrane for audio-frequency acoustic actuation [J].

Neumann, JJ ;

Gabriel, KJ .

SENSORS AND ACTUATORS A-PHYSICAL, 2002, 95 (2-3) :175-182

[7] Metal Ion Implantation for the Fabrication of Stretchable Electrodes on Elastomers [J].

Rosset, Samuel ;

Niklaus, Muhamed ;

Dubois, Philippe ;

Shea, Herbert R. .

ADVANCED FUNCTIONAL MATERIALS, 2009, 19 (03) :470-478

[8]

Sekitani T., 2008, SCIENCE, V321, P1468

[9] Microfabrication of 3D silicon MEMS structures using gray-scale lithography and deep reactive ion etching [J].

Waits, CM ;

Morgan, B ;

Kastantin, M ;

Ghodssi, R .

SENSORS AND ACTUATORS A-PHYSICAL, 2005, 119 (01) :245-253

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