Pulse enhanced electron emission (P3e™) arc evaporation and the synthesis of wear resistant Al-Cr-O coatings in corundum structure

被引：94

作者：

Ramm, Juegen ^{[1
]}

Ante, Michael ^{[1
]}

Bachmann, Theo ^{[1
]}

Widrig, Beno ^{[1
]}

Brandle, Hans ^{[1
]}

Doebeli, Max ^{[2
,3
]}

机构：

[1] OC Oerlikon Balzers AG, LI-9496 Balzers, Liechtenstein

[2] Paul Scherrer Inst, CH-8093 Zurich, Switzerland

[3] ETH, CH-8093 Zurich, Switzerland

来源：

SURFACE & COATINGS TECHNOLOGY | 2007年 / 202卷 / 4-7期

关键词：

cathodic arc; metal oxide; solid solution; corundum; thermal stability;

D O I：

10.1016/j.surfcoat.2007.05.044

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Pulse enhanced electron emission (P3e (TM)) is a new approach in PVD technology for the deposition of metal oxides. The process is dedicated to the formation of alumina-based and other metallic oxide layers and comprises high current pulse technique for the arc sources. The method allows a deposition of hard alumina-based coatings at substrate temperatures below 600 degrees C. Different oxide layers and layer combinations were prepared with this new technique illustrating the enormous potential for the design of wear resistant coatings. The layers were characterized with respect to hardness, stress, composition, crystal structure, and thermal stability. Solid solutions of (Al1-xCrx)(2)O-3 could be synthesized for a composition range of 0.3 <= 5x<l. The growth of the solid solutions has also been demonstrated at TiCN and TiAlN interfaces. (c) 2007 Elsevier B.V. All rights reserved.

引用

页码：876 / 883

页数：8

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