Scatterometry simulator using GPU and Evolutionary Algorithm.

被引：0
作者：
Shirasaki, Hirokimi [1 ]
机构：
[1] Tamagawa Univ, Coll Engn, Tokyo 1948610, Japan
来源：
METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XXV, PT 1 AND PT 2 | 2011年 / 7971卷
关键词：
Scatterometry; simulator; RCWA; CG; EA; GA; optimization algorithm; GPU; SEMICONDUCTOR CIRCUITS;
D O I：
10.1117/12.881505
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
In this paper, we show scatterometry simulation software which has the spectroscopy calculation and optimization algorithm systems. The calculation is sped up by parallel computing using the GPU (Graphics Processor Unit). Here, we use the programming language CUDA (Compute Unified Device Architecture) and CULA (CULApack) for the NVIDIA GPU. We calculate the spectroscopy using the rigorous coupled wave analysis (RCWA) which provides a method for calculating the diffraction of electromagnetic waves by periodic grating. An evolutionary algorithm (EA) and a conjugate gradient (CG) method are used as the technique to automatically search the data which resembles the given spectrum. Then, the results using this simulator are provided.
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页数：7
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