A Microfluidic Mixer of High Throughput Fabricated in Glass Using Femtosecond Laser Micromachining Combined with Glass Bonding

被引：22

作者：

Qi, Jia ^{[1
,2
]}

Li, Wenbo ^{[1
,2
,3
]}

Chu, Wei ^{[4
]}

Yu, Jianping ^{[1
,2
,5
]}

Wu, Miao ^{[4
]}

Liang, Youting ^{[4
]}

Yin, Difeng ^{[1
,2
]}

Wang, Peng ^{[1
,2
,5
]}

Wang, Zhenhua ^{[4
]}

Wang, Min ^{[4
]}

Cheng, Ya ^{[1
,4
,6
,7
]}

机构：

[1] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, State Key Lab High Field Laser Phys, Shanghai 201800, Peoples R China

[2] Univ Chinese Acad Sci, Beijing 100049, Peoples R China

[3] ShanghaiTech Univ, Sch Phys Sci & Technol, Shanghai 200031, Peoples R China

[4] East China Normal Univ, Sch Phys & Elect Sci, XXL Extreme Optoelectromech Lab, Shanghai 200241, Peoples R China

[5] Tongji Univ, Sch Phys Sci & Engn, Shanghai 200092, Peoples R China

[6] East China Normal Univ, State Key Lab Precis Spect, Shanghai 200062, Peoples R China

[7] Shandong Normal Univ, Collaborat Innovat Ctr Light Manipulat & Applicat, Jinan 250358, Peoples R China

来源：

MICROMACHINES | 2020年 / 11卷 / 02期

关键词：

ultrafast laser microfabrication; microfluidic; glass bonding; MICROMIXERS; PERFORMANCE;

D O I：

10.3390/mi11020213

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

We demonstrate a microfluidic mixer of high mixing efficiency in fused silica substrate using femtosecond laser-induced wet etching and hydroxide-catalysis bonding method. The micromixer has a three-dimensional geometry, enabling efficient mixing based on Baker's transformation principle. The cross-sectional area of the fabricated micromixer was 0.5 x 0.5 mm(2), enabling significantly promotion of the throughput of the micromixer. The performance of the fabricated micromixers was evaluated by mixing up blue and yellow ink solutions with a flow rate as high as 6 mL/min.

引用

页数：8

共 29 条

[1] 3D-Printed Microfluidics [J].

Au, Anthony K. ;

Huynh, Wilson ;

Horowitz, Lisa F. ;

Folch, Albert .

ANGEWANDTE CHEMIE-INTERNATIONAL EDITION, 2016, 55 (12) :3862-3881

[2] An integrated nanoliter DNA analysis device [J].

Burns, MA ;

Johnson, BN ;

Brahmasandra, SN ;

Handique, K ;

Webster, JR ;

Krishnan, M ;

Sammarco, TS ;

Man, PM ;

Jones, D ;

Heldsinger, D ;

Mastrangelo, CH ;

Burke, DT .

SCIENCE, 1998, 282 (5388) :484-487

[3] On a three-dimensional implementation of the baker's transformation [J].

Carriere, Philippe .

PHYSICS OF FLUIDS, 2007, 19 (11)

[4] Three-dimensional micro-optical components embedded in photosensitive glass by a femtosecond laser [J].

Cheng, Y ;

Sugioka, K ;

Midorikawa, K ;

Masuda, M ;

Toyoda, K ;

Kawachi, M ;

Shihoyama, K .

OPTICS LETTERS, 2003, 28 (13) :1144-1146

[5] Internal Laser Writing of High-Aspect-Ratio Microfluidic Structures in Silicate Glasses for Lab-on-a-Chip Applications [J].

Cheng, Ya .

MICROMACHINES, 2017, 8 (02)

[6] Analysis and multi-criteria design optimization of geometric characteristics of grooved micromixer [J].

Cortes-Quiroz, Cesar A. ;

Azarbadegan, Alireza ;

Zangeneh, Mehrdad ;

Goto, Akira .

CHEMICAL ENGINEERING JOURNAL, 2010, 160 (03) :852-864

[7] Evaluation of Floor-grooved Micromixers Using Concentration-channel Length Profiles [J].

Du, Yan ;

Zhang, Zhiyi ;

Yim, ChaeHo ;

Lin, Min ;

Cao, Xudong .

MICROMACHINES, 2010, 1 (01) :19-33

[8] Hydroxide-catalysis bonding for stable optical systems for space [J].

Elliffe, EJ ;

Bogenstahl, J ;

Deshpande, A ;

Hough, J ;

Killow, C ;

Reid, S ;

Robertson, D ;

Rowan, S ;

Ward, H ;

Cagnoli, G .

CLASSICAL AND QUANTUM GRAVITY, 2005, 22 (10) :S257-S267

[9]

Fan XD, 2011, NAT PHOTONICS, V5, P591, DOI [10.1038/nphoton.2011.206, 10.1038/NPHOTON.2011.206]

[10] Microfluidic Chips for Point-of-Care Immunodiagnostics [J].

Gervais, Luc ;

de Rooij, Nico ;

Delamarche, Emmanuel .

ADVANCED MATERIALS, 2011, 23 (24) :H151-H176

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