The effect of ambient temperature on the sensitivity of hot-cathode ionization gauges

We measured the sensitivities of five hot-cathode ionization gauges for ambient laboratory temperatures between 23 and 31 degreesC. All of the ionization gauges exhibited very similar behavior, and the sensitivity could be adequately modeled with a linear function of temperature. The slopes of the fits were smaller than one would expect due to changes in the calibration chamber number density. The thermal transpiration effect, due to local heating of the gauge structures, can account for this, and a characteristic gauge tube temperature can be inferred from the temperature dependence of the sensitivity. A recent comparison of the high vacuum standards of several National Metrology Institutes (NMIs) was performed over the range of 10(-6)-10(-3) Pa using hot-cathode and spinning rotor gauges as transfer standards. Among the participants, laboratory temperatures varied by as much as 5 degreesC. It is necessary to know how laboratory temperature affects the sensitivity of the hot-cathode transfer standards (spinning rotor gauges explicitly account for the gas temperature) so that individual laboratory results can be corrected to a common temperature. (C) 2004 Elsevier Ltd. All rights reserved.