Digital holographic Michelson interferometer for nanometrology

被引：4

作者：

Sevrygin, A. A. ^{[1
]}

Korotkov, V. I. ^{[1
]}

Pulkin, S. A. ^{[2
]}

Tursunov, I. M. ^{[1
]}

Venediktov, D. V. ^{[1
]}

Venediktov, V. Yu ^{[1
,2
,3
]}

Volkov, O. V. ^{[3
]}

机构：

[1] St Petersburg State Electrotech Inst LETI, St Petersburg 197376, Russia

[2] St Petersburg State Univ, Fac Phys, St Petersburg 198504, Russia

[3] St Petersburg Natl Res Univ Informat Technol, Mech & Opt, St Petersburg 197101, Russia

来源：

HOLOGRAPHY, DIFFRACTIVE OPTICS, AND APPLICATIONS VI | 2014年 / 9271卷

关键词：

liquid crystal; spatial light modulator; dynamic holography; holographic intereferometry; INTERFEROGRAMS; SENSITIVITY;

D O I：

10.1117/12.2071084

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The paper considers the dynamic holographic interferometry schemes with amplification (multiplication) of holographic fringes and with correction for distortions, imposed by the interferometer scheme elements. The use of digital microscope and of the matrix light modulator with direct addressing provides the completely digital closed-loop performance of the overall system for real-time evaluation of nano-scale objects size. Considered schemes were verified in the laboratory experiment, using the Michelson micro-interferometer, equipped by the USB-microscope and digital holography stage, equipped by the Holoeye spatial light modulator.

引用

页数：6

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