High-Q MEMS-Reconfigurable Waveguide Filters

被引:0
|
作者
Pelliccia, Luca [1 ]
Bastioli, Simone [1 ]
Casini, Federico [1 ]
Sorrentino, Roberto [1 ]
机构
[1] Univ Perugia, DIEI, Via G Duranti 93, I-06125 Perugia, Italy
来源
40TH EUROPEAN MICROWAVE CONFERENCE | 2010年
关键词
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper presents an innovative concept for the design of MEMS-reconfigurable bandpass filters with very high Q-factor. MEMS switches are arranged at one or both sides of a TE101 mode cavity so as to provide an equivalent reconfigurable inner waveguide wall. The effective width of the cavity can be changed by activating the MEMS switches, so as to control the cavity resonant frequency. The proposed method yields higher Q-factors with respect to other approaches involving ridged or conductor-loaded cavities. Preliminary measurements of a 10 GHz 4(th) order bandpass filter show a 400 MHz frequency shift with a Q-factor above 900.
引用
收藏
页码:1126 / 1129
页数:4
相关论文
共 50 条
  • [1] MEMS-based High-Q Reconfigurable E-plane Filters
    Pelliccia, Luca
    Farinelli, Paola
    Sorrentino, Roberto
    2011 41ST EUROPEAN MICROWAVE CONFERENCE, 2011, : 369 - 372
  • [2] High-Q MEMS-Tunable Waveguide Filters in K-band
    Pelliccia, L.
    Cacciamani, F.
    Sorrentino, R.
    Farinelli, P.
    Ligander, P.
    Persson, O.
    2012 42ND EUROPEAN MICROWAVE CONFERENCE (EUMC), 2012, : 273 - 276
  • [3] High-Q Tunable Waveguide Filters Using Ohmic RF MEMS Switches
    Pelliccia, Luca
    Cacciamani, Fabrizio
    Farinelli, Paola
    Sorrentino, Roberto
    IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 2015, 63 (10) : 3381 - 3390
  • [4] High-Q MEMS-based Bandwidth-Reconfigurable E-plane Filters
    Pelliccia, Luca
    Sorrentino, Roberto
    2010 ASIA-PACIFIC MICROWAVE CONFERENCE, 2010, : 151 - 154
  • [5] High-Q Fully Reconfigurable Tunable Bandpass Filters
    Joshi, Himanshu
    Sigmarsson, Hjalti H.
    Moon, Sungwook
    Peroulis, Dimitrios
    Chappell, William J.
    IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 2009, 57 (12) : 3525 - 3533
  • [6] MEMS-reconfigurable bandpass filter
    Corchia, Laura
    Monti, Giuseppina
    Tarricone, Luciano
    MICROWAVE AND OPTICAL TECHNOLOGY LETTERS, 2008, 50 (08) : 2096 - 2099
  • [7] Wideband micromachined transitions for MEMS tunable high-Q filters
    Margomenos, Alexandros
    Lee, Yongshik
    Jain, Alok
    Yao, Terry
    Peroulis, Dimitris
    Katehi, Linda P. B.
    2006 EUROPEAN MICROWAVE CONFERENCE, VOLS 1-4, 2006, : 1425 - +
  • [8] Optical devices with high-Q waveguide resonators for filters and crossings
    Harbers, R
    Moll, N
    Erni, D
    Bona, GL
    Bächtold, W
    PHOTONIC CRYSTAL MATERIALS AND NANOSTRUCTURES, 2004, 5450 : 173 - 180
  • [9] A MEMS-reconfigurable power divider on high resistivity silicon substrate
    Ocera, A.
    Farinelli, P.
    Cherubini, F.
    Mezzanotte, P.
    Sorrentino, R.
    Margesin, B.
    Giacomozzi, F.
    2007 IEEE/MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM DIGEST, VOLS 1-6, 2007, : 501 - 504
  • [10] A MEMS high-Q tunable capacitor for reconfigurable microwave integrated circuits
    Nordquist, CD
    Muyshondt, A
    Pack, MV
    Finnegan, PS
    Dyck, CW
    Reines, IC
    Kraus, GM
    Sloan, GR
    Sullivan, CT
    MEMS COMPONENTS AND APPLICATIONS FOR INDUSTRY, AUTOMOBILES, AEROSPACE, AND COMMUNICATION II, 2003, 4981 : 1 - 8