The deposition and wear properties of cathodic arc plasma deposition TiAlN deposits

被引：29

作者：

Lin, KL ^{[1
]}

Hwang, MY ^{[1
]}

Wu, CD ^{[1
]}

机构：

[1] MET IND RES & DEV CTR,KAOHSIUNG,TAIWAN

来源：

MATERIALS CHEMISTRY AND PHYSICS | 1996年 / 46卷 / 01期

关键词：

deposition; wear; cathodic are plasma deposition; TiAlN deposits;

D O I：

10.1016/0254-0584(96)80134-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

TiAlN coatings on tool steel were produced with a cathodic are plasma deposition system. The Taguchi experimental design was applied to achieve the optimum wear-resistant coating. Substrate bias, nitrogen partial pressure and target composition were found to be among the most influential variables that govern the wear resistance of the coatings. The coating properties investigated in the present work include the surface roughness, scanning electron microscope (SEM) surface micrographs, X-ray diffraction (XRD) phase identification, coating microstructure, coating compositions, wear surface micrographs and elemental analysis. The microstructure, microhardness, coating Ti content and residence of wearing debris were found to significantly affect the wear resistance of the coatings.

引用

页码：77 / 83

页数：7

共 31 条

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