Towards Tactile Sensing System on Chip for Robotic Applications

被引：124

作者：

Dahiya, Ravinder S. ^{[1
]}

Cattin, Davide ^{[3
]}

Adami, Andrea ^{[1
]}

Collini, Cristian ^{[1
]}

Barboni, Leonardo ^{[2
]}

Valle, Maurizio ^{[2
]}

Lorenzelli, Leandro ^{[1
]}

Oboe, Roberto ^{[3
]}

Metta, Giorgio ^{[4
]}

Brunetti, Francesca ^{[5
]}

机构：

[1] Fdn Bruno Kessler, Ctr Mat & Microsyst, Bio MEMS Grp, I-36100 Trento, Italy

[2] Univ Genoa, DIBE, I-16145 Genoa, Italy

[3] Univ Padua, I-38123 Vicenza, Italy

[4] Ist Italiano Tecnol, I-16163 Genoa, Italy

[5] Univ Roma Tor Vergata, I-00133 Rome, Italy

来源：

IEEE SENSORS JOURNAL | 2011年 / 11卷 / 12期

关键词：

Humanoid robots; POSFET; robotic skin; tactile sensing; touch sensing system on chip; LARGE-AREA; SENSOR; TRANSISTORS; RUBBER;

D O I：

10.1109/JSEN.2011.2159835

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents the research on tactile sensing system on chip. The tactile sensing chips comprise of 5 5 array of Piezoelectric Oxide Semiconductor Field Effect Transistor (POSFET) devices and temperature sensors. The POSFET devices are obtained by spin coating piezoelectric polymer, poly(vinylidene fluoride-trifluoroethylene) (P(VDF-TrFE)), films directly on to the gate area of Metal Oxide Semiconductor (MOS) transistors. The tactile sensing chips are able to measure dynamic contact forces and temperatures. The readout and the data acquisition system to acquire the tactile signals are also presented. The chips have been extensively tested over wide range of dynamic contact forces and temperatures and the experimental results are presented. The paper also reports the research on tactile sensing chips with POSFET array and the integrated electronics.

引用

页码：3216 / 3226

页数：11

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