Microsystems for automotive applications

被引：0

作者：

Marek, J ^{[1
]}

机构：

[1] Robert Bosch GmbH, D-72765 Reutlingen, Germany

来源：

MICROENGINEERING 99, PROCEEDINGS | 1999年

关键词：

automotive applications; pressure sensor; mass-flow sensor; yaw-rate sensor; acceleration sensor;

D O I：

暂无

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The integration of microelectronic and micromechanical devices into one system - the microsystem technology - is rapidly gaining importance in automobiles. According to market studies the content of electronics as well as of microsystems in automobiles is increasing move than proportionally. The major driving forces are the environmental requirements, safety and comfort. The microsystem technology contributes in these areas due to the reduction of costs, weight and size as well as improved reliability and functionality. Sensor systems for the measurement of manifold air intake pressure, mass flow, acceleration for ABS and airbag and yaw rate will be discussed in detail. In the nineties a new technology, the surface micromachining, is emerging.

引用

页码：107 / 114

页数：8