Atmospheric pressure route to epitaxial nitrogen-doped trilayer graphene on 4H-SiC (0001) substrate

被引:29
|
作者
Boutchich, M. [1 ]
Arezki, H. [1 ]
Alamarguy, D. [1 ]
Ho, K-I [2 ]
Sediri, H. [3 ,4 ]
Guenes, F. [1 ]
Alvarez, J. [1 ]
Kleider, J. P. [1 ]
Lai, C. S. [2 ]
Ouerghi, A. [3 ]
机构
[1] Univ Paris 06, Sorbonne Univ, Univ Paris 11, LGEP,CNRS,UMR8507,SUPELEC, F-91192 Gif Sur Yvette, France
[2] Chang Gung Univ, Dept Elect Engn, Taoyuan 333, Taiwan
[3] CNRS, LPN, F-91460 Marcoussis, France
[4] Ctr Rech & Technol Energie, Lab Photovolta, Hammam Lif 2050, Tunisia
关键词
CHARGE-TRANSFER; SOLAR-CELLS; HETEROSTRUCTURES; TRANSISTORS; HYDROGEN; SILICON; OXIDE;
D O I
10.1063/1.4903866
中图分类号
O59 [应用物理学];
学科分类号
摘要
Large-area graphene film doped with nitrogen is of great interest for a wide spectrum of nanoelectronics applications, such as field effect devices, super capacitors, and fuel cells among many others. Here, we report on the structural and electronic properties of nitrogen doped trilayer graphene on 4H-SiC (0001) grown under atmospheric pressure. The trilayer nature of the growth is evidenced by scanning transmission electron microscopy. X-ray photoelectron spectroscopy shows the incorporation of 1.2% of nitrogen distributed in pyrrolic-N, and pyridinic-N configurations as well as a graphitic-N contribution. This incorporation causes an increase in the D band on the Raman signature indicating that the nitrogen is creating defects. Ultraviolet photoelectron spectroscopy shows a decrease of the work function of 0.3 eV due to the N-type doping of the nitrogen atoms in the carbon lattice and the edge defects. A top gate field effect transistor device has been fabricated and exhibits carrier mobilities up to 1300 cm(2)/V s for holes and 850 cm(2)/V s for electrons at room temperature. (C) 2014 AIP Publishing LLC.
引用
收藏
页数:5
相关论文
共 50 条
  • [31] Epitaxial growth of TiN on (0001) semi-insulating 4H-SiC substrate by reactive sputtering
    Chen, Hsueh-, I
    Chiu, Kun-An
    Lin, Jing-Feng
    Lin, Kuan-Yu
    Chen, Wei-Chia
    Wu, Ping-Hsun
    Ko, Cheng-Jung
    Chang, Li
    Chen, Chun-Hua
    SURFACE & COATINGS TECHNOLOGY, 2022, 437
  • [32] Improvement of nitrogen incorporation into oxynitrides on 4H-SiC(0001)
    Hoffmann, P
    Schmeisser, D
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2006, 246 (01): : 85 - 89
  • [33] Nitrogen Passivation of (0001) 4H-SiC Dangling Bonds
    Pennington, G.
    Ashman, C. R.
    SILICON CARBIDE AND RELATED MATERIALS 2007, PTS 1 AND 2, 2009, 600-603 : 469 - +
  • [34] Nanoscale structural characterization of epitaxial graphene grown on off-axis 4H-SiC (0001)
    Vecchio, Carmelo
    Sonde, Sushant
    Bongiorno, Corrado
    Rambach, Martin
    Yakimova, Rositza
    Raineri, Vito
    Giannazzo, Filippo
    NANOSCALE RESEARCH LETTERS, 2011, 6
  • [35] First-Principles Calculation Study of Epitaxial Graphene Layer on 4H-SiC (0001) Surface
    Ishii, Junko
    Matsushima, Shigenori
    Nakamura, Hiroyuki
    Ikari, Tomonori
    Naitoh, Masamichi
    E-JOURNAL OF SURFACE SCIENCE AND NANOTECHNOLOGY, 2016, 14 : 107 - 112
  • [36] Nanoscale structural characterization of epitaxial graphene grown on off-axis 4H-SiC (0001)
    Carmelo Vecchio
    Sushant Sonde
    Corrado Bongiorno
    Martin Rambach
    Rositza Yakimova
    Vito Raineri
    Filippo Giannazzo
    Nanoscale Research Letters, 6
  • [37] Epitaxial Graphene on 4H-SiC (0001) as a Versatile Platform for Materials Growth: Mini-Review
    Shtepliuk, Ivan
    Giannazzo, Filippo
    Yakimova, Rositsa
    APPLIED SCIENCES-BASEL, 2021, 11 (13):
  • [38] Effect of graphene/4H-SiC(0001) interface on electrostatic properties in graphene
    Sonde, S.
    Vecchio, C.
    Giannazzo, F.
    Yakimova, R.
    Raineri, V.
    Rimini, E.
    PHYSICA E-LOW-DIMENSIONAL SYSTEMS & NANOSTRUCTURES, 2012, 44 (06): : 993 - 996
  • [39] Growth and characterization of nitrogen-doped C-face 4H-SiC epilayers
    Chen, Wenzhou
    Lee, Kung-Yen
    Capano, Michael A.
    JOURNAL OF CRYSTAL GROWTH, 2006, 297 (02) : 265 - 271
  • [40] 30° Si(g) partial dislocation mobility in nitrogen-doped 4H-SiC
    Idrissi, H.
    Pichaud, B.
    Regula, G.
    Lancin, M.
    JOURNAL OF APPLIED PHYSICS, 2007, 101 (11)