Three-Dimensional Printing of Interconnects by Laser Direct-Write of Silver Nanopastes

被引:142
作者
Wang, Jiwen [1 ]
Auyeung, Raymond C. Y. [1 ]
Kim, Heungsoo [1 ]
Charipar, Nicholas A. [1 ]
Pique, Alberto [1 ]
机构
[1] USN, Res Lab, Washington, DC 20375 USA
关键词
ALUMINA SUSPENSIONS; PERIODIC STRUCTURES; FABRICATION; ELECTRODES; RHEOLOGY; FILM;
D O I
10.1002/adma.201001729
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
A novel non-contact 3-dimensional laser direct-write process is demonstrated. Freestanding silver interconnects with various widths (8-75 μm), loop heights (1-10 μm), and bond lengths (8-100 μm) are printed on various substrates. We demonstrate the capability of this technology for ultrafine (<1 μm) pitch bonding and for connecting LEDs embedded in flexible polyimide substrates © 2010 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
引用
收藏
页码:4462 / 4466
页数:5
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