Engineering the Interfacial Electronic: Structure of EpitaXial Gel/lAs(001) Heterointerfaces via Substitutional Boron Incorporation: The Roles of Doping and Interface Stoichiometry

被引:8
作者
Clavel, Michael B. [1 ]
Greene-Diniz, Gabriel [2 ]
Gruning, Myrta [2 ,3 ]
Henry, Karen T. [4 ]
Kuhn, Markus [4 ]
Bodnar, Robert J. [5 ]
Hudait, Mantu K. [1 ]
机构
[1] Virginia Tech, Bradley Dept Elect & Comp Engn, ADSEL, Blacksburg, VA 24061 USA
[2] Queens Univ Belfast, Sch Math & Phys, Belfast BT7 1NN, Antrim, North Ireland
[3] ETSF, B-4000 Liege, Belgium
[4] Intel Corp, Hillsboro, OR 97124 USA
[5] Virginia Tech, Dept Geosci, Fluids Res Lab, Blacksburg, VA 24061 USA
关键词
germanium; AlAs; band alignment; molecular beam epitaxy; X-ray photoelectron spectroscopy; Raman spectroscopy; first-principles; density functional theory; GE; GERMANIUM; SILICON; SI; DEVICES;
D O I
10.1021/acsaelm.9b00615
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A joint experimental and theoretical framework for the decoupling of boron (B) doping and stoichiometric-induced modifications to the structural properties and electronic band structure of germanium (Ge)/AlAs(001) heterostructures is presented. The effect of B -induced stress on nearest -neighbor Ge bonds is quantified via X-ray diffractometry and Raman spectroscopic analysis and subsequently interpreted through the lens of density functional perturbation theory. Similarly, experimental determination of the energy band alignment at the p -type Ge:B/AIAs heterointerface is understood using a density functional theory approach to model the influence of heterointerface stoichiometry and interatomic bonding between group IV and III V interfacial atoms on the valence and conduction band discontinuities. The modeled two monolayer interatomic diffusion at the Ge/AlAs heterointerface is confirmed via atom probe tomography analysis, demonstrating a 6 A interfacial width. These results present a unified picture of the Ge:B/AlAs(001) material system, highlighting the influence of B on its structural and electronic properties, and provide a path for the engineering of such heterointerfaces through high concentration dopant incorporation within the overlying Ge epilayer.
引用
收藏
页码:2646 / 2654
页数:17
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