High frequency operation of a hot filament cathode for a magnetized plasma ion source

被引：4
|
作者：
Takahashi, Y. [2 ]
Miyamoto, N. [2 ]
Kasuya, T. [2 ]
Wada, M. [1 ]
机构：
[1] Doshisha Univ, Fac Life Med Sci, Kyoto 6100321, Japan
[2] Doshisha Univ, Grad Sch Engn, Kyoto 6100321, Japan
来源：
REVIEW OF SCIENTIFIC INSTRUMENTS | 2012年 / 83卷 / 02期
关键词：
IMPLANTATION; DISCHARGE; TUNGSTEN;
D O I：
10.1063/1.3672470
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
A tungsten filament cathode has been operated with an ac heating current to excite a plasma in a linear magnetic field. Both the discharge current and the ion saturation current in plasma near the extraction hole of the ion source exhibited fluctuations. The discharge current fluctuated with the amplitude less than 2% of the average, and the frequency two times the frequency of the heating current. Fluctuation amplitude of the ion saturation current was about 10% of the average, while the frequency was the same as that of the heating current. The ac operation has prolonged the lifetime of a hot filament cathode by about 50%. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.3672470]
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页数：3
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