High frequency operation of a hot filament cathode for a magnetized plasma ion source

被引:4
|
作者
Takahashi, Y. [2 ]
Miyamoto, N. [2 ]
Kasuya, T. [2 ]
Wada, M. [1 ]
机构
[1] Doshisha Univ, Fac Life Med Sci, Kyoto 6100321, Japan
[2] Doshisha Univ, Grad Sch Engn, Kyoto 6100321, Japan
来源
REVIEW OF SCIENTIFIC INSTRUMENTS | 2012年 / 83卷 / 02期
关键词
IMPLANTATION; DISCHARGE; TUNGSTEN;
D O I
10.1063/1.3672470
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
A tungsten filament cathode has been operated with an ac heating current to excite a plasma in a linear magnetic field. Both the discharge current and the ion saturation current in plasma near the extraction hole of the ion source exhibited fluctuations. The discharge current fluctuated with the amplitude less than 2% of the average, and the frequency two times the frequency of the heating current. Fluctuation amplitude of the ion saturation current was about 10% of the average, while the frequency was the same as that of the heating current. The ac operation has prolonged the lifetime of a hot filament cathode by about 50%. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.3672470]
引用
收藏
页数:3
相关论文
共 50 条
  • [1] Development of a Co-Axial Hot Cathode for Magnetized Ion Source Plasma
    Miyamoto, N.
    Hamamoto, N.
    Imakita, S.
    Mendenilla, A. G.
    Wada, M.
    ION IMPLANTATION TECHNOLOGY 2008, 2008, 1066 : 304 - +
  • [2] HOT CATHODE CYCLOTRON ION SOURCE WITHOUT FILAMENT
    VANGENDEREN, W
    NUCLEAR INSTRUMENTS & METHODS, 1963, 23 (02): : 359 - 359
  • [3] Hot Cathode’s Working Voltage Impacts on the Operation of High Current Ion Source
    Yuqian Chen
    Chundong Hu
    Zhimin Liu
    Yahong Xie
    Journal of Fusion Energy, 2014, 33 : 736 - 739
  • [4] Hot Cathode's Working Voltage Impacts on the Operation of High Current Ion Source
    Chen, Yuqian
    Hu, Chundong
    Liu, Zhimin
    Xie, Yahong
    JOURNAL OF FUSION ENERGY, 2014, 33 (06) : 736 - 739
  • [5] Ion beam oscillation due to fluctuation of a hot filament driven magnetized plasma
    Imakita, S.
    Miyamoto, N.
    Kasuya, T.
    Kimura, Y.
    Wada, M.
    REVIEW OF SCIENTIFIC INSTRUMENTS, 2010, 81 (02):
  • [6] FEATURES OF A PLASMA ION SOURCE WITH A HOT CATHODE GAS DISCHARGE
    CIAMPI, M
    TALINI, N
    NUCLEAR INSTRUMENTS & METHODS, 1966, 43 (02): : 325 - &
  • [7] Operation Modes of Hot-Cathode Plasma Source for Linear Devices
    Akhmetov, Timur D.
    Davydenko, Vladimir, I
    Ivanov, Alexandr A.
    Shulzhenko, Grigory, I
    PLASMA AND FUSION RESEARCH, 2019, 14 (Specialissue1)
  • [8] Study the Characteristic of the Hot Cathode of High Current Ion Source
    Yuqian Chen
    Chundong Hu
    Zhimin Liu
    Yahong Xie
    Sheng Liu
    Caichao Jiang
    Journal of Fusion Energy, 2013, 32 : 536 - 539
  • [9] Study the Characteristic of the Hot Cathode of High Current Ion Source
    Chen, Yuqian
    Hu, Chundong
    Liu, Zhimin
    Xie, Yahong
    Liu, Sheng
    Jiang, Caichao
    JOURNAL OF FUSION ENERGY, 2013, 32 (05) : 536 - 539
  • [10] PLASMA FILAMENT ION SOURCE FOR HIGH CURRENT IMPLANTER.
    Yabe, E.
    Ishizaka, N.
    Shibuya, T.
    Tonegawa, A.
    Takayama, K.
    Fukui, R.
    Takagi, K.
    Kikuchi, R.
    Okamoto, K.
    Komiya, S.
    Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, 1986, B21 (2-4) : 190 - 193