Uncooled all-parylene bolometer

被引：9

作者：

Liger, M ^{[1
]}

Konishi, S ^{[1
]}

Tai, YC ^{[1
]}

机构：

[1] CALTECH, Pasadena, CA 91125 USA

来源：

MEMS 2004: 17TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 2004年

关键词：

D O I：

10.1109/MEMS.2004.1290654

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents an uncooled, room-temeprature, all-parylene bolometer. The device is made of two layers of pyrolyzed (or "carbonized") parylene and a metal layer for interconnections. We demonstrated that high responsivity can be achieved by tailoring the electrical conductivity and the temperature coefficient of resistance (TCR) using different pyrolysis conditions for each parylene layer.

引用

收藏

页码：593 / 596

页数：4

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