Influence of the experimental procedure in the specific surface measurement by chemical dissolution of n+ nanoporous silicon

In this paper, we used the chemical dissolution of porous silicon (PS) to determine the specific surface area of PS obtained from n(+) substrate. Two initial porosity values (62 and 39% with 1 mu m and 0.5 mu m thickness respectively) and two dissolution etchants were used. It is shown that the dissolution experimental procedure influences the extracted specific surface value. Under good dissolution conditions, we calculed 90 m(2)/cm(3) and 130 m(2)/cm(3) surface area value respectively. (c) 2005 WILEY-VCH Veriag GmbH & Co. KGaA, Weinheim.