Optimizing the on-chip electrostatic discharge protection device by Taguchi's methodology

被引:1
作者
Huang, Shao-Chang [1 ]
Wang, Chau-Shing [2 ]
Chiu, Jing-Er [3 ]
Yang, Wen-Ren [2 ]
Chen, Ke-Horng [4 ]
机构
[1] Vanguard Int Semicond Corp, Hsinchu, Taiwan
[2] Natl Changhua Univ Educ, Dept Elect Engn, Changhua, Taiwan
[3] Natl Yunlin Univ Sci & Technol, Dept Ind Engn & Management, Yunlin, Taiwan
[4] Natl Yang Ming Chiao Tung Univ, Inst Elect & Control Engn, Hsinchu, Taiwan
关键词
Taguchi; ESD; HBM; MM; ESD; OPTIMIZATION; RELIABILITY; DESIGN;
D O I
10.1016/j.microrel.2022.114662
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The study presents the use of Taguchi method to obtain the best ESD performance devices and compares the performance with other methods. A full-factor method to obtain the best ESD performance devices can achieve all experimental factor effects, but at a significant cost. Through silicon data validation and analysis, Taguchi's method has been shown to save two-thirds of the cost for optimal ESD devices compared to the full-factor approach. In addition, if the layout area is very concerned in advanced technologies such as 40 nm and 28 nm, a tentative method called the single-factor-middle-level method is proposed as another ESD device opti-mization method.
引用
收藏
页数:9
相关论文
共 22 条
[1]  
Allen E, 2002, INT J ENG EDUC, V18, P519
[2]  
[Anonymous], 2006, JESD22A114D JEDEC
[3]  
[Anonymous], 1997, JESD22A115A JEDEC
[4]   On the use of data compression measures to analyze robust designs [J].
Ben-Gal, I .
IEEE TRANSACTIONS ON RELIABILITY, 2005, 54 (03) :381-388
[5]   Design methodology and optimization of gate-driven NMOS ESD protection circuits in submicron CMOS processes [J].
Chen, JZ ;
Amerasekera, EA ;
Duvvury, C .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1998, 45 (12) :2448-2456
[6]   Analysis of reliability and optimization of ESD protection devices supported by modeling and simulation [J].
Chvala, A. ;
Donoval, D. ;
Beno, P. ;
Marek, J. ;
Pribytny, P. ;
Molnar, M. .
MICROELECTRONICS RELIABILITY, 2012, 52 (06) :1031-1038
[7]   USING STATISTICALLY DESIGNED EXPERIMENTS TO IMPROVE RELIABILITY AND TO ACHIEVE ROBUST RELIABILITY [J].
HAMADA, M .
IEEE TRANSACTIONS ON RELIABILITY, 1995, 44 (02) :206-215
[8]   NOVEL TEST STRUCTURE FOR THE MEASUREMENT OF ELECTROSTATIC DISCHARGE PULSES [J].
LENDENMANN, H ;
SCHRIMPF, RD ;
BRIDGES, AD .
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, 1991, 4 (03) :213-218
[9]   Design and optimization of LDMOS-SCR devices with improved ESD protection performance [J].
Liang, Hailian ;
Cao, Huafeng ;
Gu, Xiaofeng ;
Guo, Zixiang .
MICROELECTRONICS RELIABILITY, 2016, 61 :115-119
[10]   Design of ESD Protection Device for K/Ka-Band Applications in Nanoscale CMOS Process [J].
Lin, Chun-Yu ;
Chang, Rong-Kun .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2015, 62 (09) :2824-2829