Investigation of AFM-based machining of ferroelectric thin films at the nanoscale

被引:14
作者
Zhang, Fengyuan [1 ,2 ]
Edwards, David [1 ,2 ]
Deng, Xiong [3 ]
Wang, Yadong [3 ]
Kilpatrick, Jason, I [1 ,2 ]
Bassiri-Gharb, Nazanin [4 ,5 ]
Kumar, Amit [6 ]
Chen, Deyang [3 ]
Gao, Xingsen [3 ]
Rodriguez, Brian J. [1 ,2 ]
机构
[1] Univ Coll Dublin, Sch Phys, Dublin DO4 V1W8, Ireland
[2] Univ Coll Dublin, Conway Inst Biomol & Biomed Res, Dublin D04 V1W8, Ireland
[3] South China Acad Adv Optoelect, Inst Adv Mat, Guangzhou 510006, Peoples R China
[4] Georgia Inst Technol, Sch Mat Sci & Engn, Atlanta, GA 30332 USA
[5] Georgia Inst Technol, George W Woodruff Sch Mech Engn, Atlanta, GA 30332 USA
[6] Queens Univ Belfast, Sch Math & Phys, Ctr Nanostruct Media, Belfast BT7 1NN, Antrim, North Ireland
基金
爱尔兰科学基金会; 中国国家自然科学基金; 英国工程与自然科学研究理事会; 美国国家科学基金会;
关键词
PIEZORESPONSE FORCE MICROSCOPY; DOMAIN-STRUCTURES; LITHIUM-NIOBATE; TOP-DOWN; TIP; NANOSTRUCTURES; FABRICATION; SILICON; NANOFABRICATION; LITHOGRAPHY;
D O I
10.1063/1.5133018
中图分类号
O59 [应用物理学];
学科分类号
摘要
Atomic force microscopy (AFM) has been utilized for nanomechanical machining of various materials including polymers, metals, and semiconductors. Despite being important candidate materials for a wide range of applications including data storage and actuators, ferroelectric materials have rarely been machined via AFM. AFM-based machining of ferroelectric nanostructures offers advantages over established techniques, such as bottom-up approaches and focused ion beam milling, in select cases where low damage and low-cost modification of already-fabricated thin films are required. Through a systematic investigation of a broad range of AFM parameters, we demonstrate that AFM-based machining provides a low-cost option to rapidly modify local regions of the film, as well as fabricate a range of different nanostructures, including a nanocapacitor array with individually addressable ferroelectric elements. Published under license by AIP Publishing.
引用
收藏
页数:10
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