A free boundary problem in the theory of electrically actuated microdevices

被引:10
作者
Cimatti, Giovanni [1 ]
机构
[1] Dipartimento Matemat, Pisa, Italy
关键词
microelectromechanical systems; free boundary problems;
D O I
10.1016/j.aml.2006.07.016
中图分类号
O29 [应用数学];
学科分类号
070104 ;
摘要
Electrostatically deflected elastic systems are increasingly used in technical applications. We study a typical situation as a free boundary problem and prove, under quite general hypotheses, the existence of a local branch of solutions. Hadamard's variational formula is crucial in the proof, which is based on the implicit function theorem in Banach spaces. (c) 2007 Elsevier Ltd. All rights reserved.
引用
收藏
页码:1232 / 1236
页数:5
相关论文
共 6 条
[1]  
GARABEDIAN P, 1952, J ANAL MATH, V2, P281
[2]  
HADAMARD J, 1968, CNRS, V2
[3]  
Mignot F., 1980, COMMUN PART DIFF EQ, V5, P791
[4]   Mathematical modeling of electrostatic MEMS with tailored dielectric properties [J].
Pelesko, JA .
SIAM JOURNAL ON APPLIED MATHEMATICS, 2002, 62 (03) :888-908
[5]   Electrostatic deflections of circular elastic membranes [J].
Pelesko, JA ;
Chen, XY .
JOURNAL OF ELECTROSTATICS, 2003, 57 (01) :1-12
[6]   COALESCENCE OF CLOSELY SPACED DROPS WHEN THEY ARE AT DIFFERENT ELECTRIC POTENTIALS [J].
TAYLOR, G .
PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES, 1968, 306 (1487) :423-&