Simulations of boron doping in a-Si:H

被引:7
|
作者
Fedders, PA
Drabold, DA
机构
[1] Washington Univ, Dept Phys, St Louis, MO 63130 USA
[2] Ohio Univ, Dept Phys & Astron, Athens, OH 45701 USA
[3] Ohio Univ, Condensed Matter & Surface Sci Program, Athens, OH 45701 USA
基金
美国国家科学基金会;
关键词
boron doping; a-Si : H; H passivation; three-fold coordinated sites;
D O I
10.1016/S0022-3093(98)00078-7
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The doping efficiency of B in a-Si:H is usually explained by the argument that almost all of the B is incorporated into three-fold coordinated sites and that B is inert or non-doping in this configuration. Using ab initio molecular dynamics (MD), we have computed the energetics and doping (electronic structure) consequences of B incorporation into a-Si:H both with and without H passivation. Our results indicate that the conventional view is in error and that the doping efficiency is primarily due to H passivation. Studies of P in a-Si:H show that the conventional view of that dopant is correct. (C) 1998 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:376 / 379
页数:4
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