Dielectric breakdown characteristics of sol-gel derived SrTiO3 films

被引：12

作者：

Peng, Yong ^{[1
]}

Yao, Manwen ^{[1
]}

Li, Fei ^{[1
]}

Su, Zhen ^{[1
]}

Yao, Xi ^{[1
]}

机构：

[1] Tongji Univ, Sch Mat Sci & Engn, Funct Mat Res Lab, Shanghai 200092, Peoples R China

来源：

JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS | 2016年 / 27卷 / 08期

基金：

对外科技合作项目（国际科技项目）; 中国国家自然科学基金;

关键词：

ENERGY-STORAGE; CERAMICS; THICK; RE; GD;

D O I：

10.1007/s10854-016-4810-0

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Dielectric breakdown behavior of sol-gel derived SrTiO3 films has been studied systematically. The dielectric strength and leakage characteristics of SrTiO3 films were observed to have a strong dependence on the top electrode materials. Compared with films with Ti or Al electrode, SrTiO3 films with Au electrode exhibited relatively low dielectric breakdown strength. Simultaneously, a broad area of damage occurred in the Au electrode after breakdown, which is closely related to the self-healing breakdown mechanism. The corresponding leakage current kept the same order of magnitude when the electric field was higher than 100 MV/m. The higher dielectric strength of the films with Ti or Al electrode is attributed to anodic oxidation of metal electrode.

引用

页码：8100 / 8104

页数：5

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