Grazing incidence X-ray studies of ultra-thin Lumogen films

被引:8
作者
Keough, S. J. [1 ]
Hanley, T. L. [2 ]
Wedding, A. B. [3 ]
Quinton, J. S. [1 ]
机构
[1] Flinders Univ S Australia, Sch Chem Phys & Earth Sci, Smart Surface Struct Grp, Adelaide, SA 5001, Australia
[2] Australian Nucl Sci & Technol Org, Bragg Inst, Menai, NSW 2234, Australia
[3] Univ S Australia, Sch Elect & Informat Engn, Adelaide, SA 5001, Australia
关键词
Lumogen; PVD; UV imaging; thin films; grazing X-rays;
D O I
10.1016/j.susc.2007.06.053
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Lumogen(R) Yellow S0790 films have been produced on silicon wafer substrates via physical vapour deposition (PVD) and spin-coating (SC) methods. These coatings were characterised with X-ray reflectometry (XRR) and grazing incidence X-ray diffraction (GIXD) techniques. The results show that ultra-thin (less than 12 nm) PVD films coat amorphously, with crystallinity becoming increasingly apparent with increasing film thickness. In contrast, measurements of ultra-thin (less than similar to 2 nm) spin-coated films reveal a second, apparently stable crystalline structure. (C) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码:5744 / 5749
页数:6
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