Microstructure and magnetic properties of Fe72.5Si14.2B8.7Nb2Mo1.5Cu1.1 thin films

被引:4
作者
Mikhalitsyna, E. A. [1 ]
Kataev, V. A. [1 ]
Larranaga, A. [2 ]
Lepalovskij, V. N. [1 ]
Turygin, A. P. [1 ]
机构
[1] Ural Fed Univ, Inst Nat Sci, 19 Mira St, Ekaterinburg 620002, Russia
[2] Univ Basque Country UPV EHU, SGIker, Box 644, Bilbao 48080, Spain
关键词
Soft magnetic materials; FINEMET; Thin films; Heat treatments; ULTRAFINE GRAIN-STRUCTURE; NANOCRYSTALLINE MATERIALS; STRUCTURAL-PROPERTIES; AMORPHOUS-ALLOYS; SOFT MAGNETS; FINEMET; ANISOTROPY; FECUNBSIB; BEHAVIOR; RIBBONS;
D O I
10.1016/j.jmmm.2016.01.040
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
This paper surveys structure and magnetic properties of the thin films with thicknesses of 30, 70,100 and 200 nm, prepared by high-frequency ion-plasma sputtering of Fe72.5Si14.2B8.7Nb2Mo1.5Cu1.1 target onto monocrystalline Si substrates. As-deposited films exhibited the roentgen-amorphous state and in-plane induced magnetic anisotropy. Their crystallization and drastic growth of the grains up to 40 nm at 460 degrees C were revealed and examined by X-ray diffraction methods. Among the measured magnetic properties of the films, the magnetic anisotropy and coercivity were stressed. Their changes with the annealing temperature and film thickness were discussed. The influence of the surface roughness on the coercivity was also investigated with atomic force microscopy. (C) 2016 Elsevier B.V. All rights reserved.
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页码:61 / 65
页数:5
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