Preparation and properties of a high temperature, flexible and colorless ITO coated polyimide substrate

被引：60
作者：
Li, Tung-Lin [1 ]
Hsu, Steve Lien-Chung [1 ]
机构：
[1] Natl Cheng Kung Univ, Frontier Mat & Micro Nano Sci & Technol Ctr, Dept Mat Sci & Engn, Tainan 70101, Taiwan
来源：
EUROPEAN POLYMER JOURNAL | 2007年 / 43卷 / 08期
关键词：
polyimide; indium-tin-oxide; plastic substrate;
D O I：
10.1016/j.eurpolymj.2007.04.039
中图分类号：
O63 [高分子化学（高聚物）];
学科分类号：
070305 ; 080501 ; 081704 ;
摘要：
A new high temperature, flexible and colorless indium-tin-oxide (ITO) coated plastic substrate has been prepared from a thermally stable, high glass transition temperature (T-g) and colorless polyimide film. The polyimide was synthesized from 3,3'-diaminodiphenylsulfone (3,3'-DDS) and 4,4'-(hexafluoroisopropylidene) diphthalic anhydride (6FDA) monomers. Its heat distortion temperature was 278 degrees C. The ITO was deposited on the polyimide film using the magnetron-sputtering process. After annealing at 250 degrees C under nitrogen for 1 h, the resistivity of the ITO film was 4.0 x 10(-4) Omega cm, and its transmittance was 83.5%. Scanning electron microscope (SEM) and X-ray diffraction (XRD) were used to observe the surface and morphology of the ITO film. UV-visible spectroscopy and the four-probe method were used to study their optical and electrical properties. The high performance ITO-plastic substrate can be used in the next generation flat panel displays. (c) 2007 Elsevier Ltd. All rights reserved.
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页码：3368 / 3373
页数：6
相关论文
共 21 条
[1]   Ultra barrier flexible substrates for flat panel displays [J].
Burrows, PE ;
Graff, GL ;
Gross, ME ;
Martin, PM ;
Shi, MK ;
Hall, M ;
Mast, E ;
Bonham, C ;
Bennett, W ;
Sullivan, MB .
DISPLAYS, 2001, 22 (02) :65-69
[2]  
DINEHART RA, 1971, MAKROMOLEKUL CHEM, V143, P189
[3]   Melt-processable poly(ether imide)s based on catechol bis(ether anhydride) [J].
Eastmond, GC ;
Paprotny, J ;
Irwin, RS .
MACROMOLECULES, 1996, 29 (05) :1382-1388
[4]   POLYIMIDES CONTAINING OXYETHYLENE UNITS [J].
FELD, WA ;
RAMALINGAM, B ;
HARRIS, FW .
JOURNAL OF POLYMER SCIENCE PART A-POLYMER CHEMISTRY, 1983, 21 (02) :319-328
[5]   Characterization of transparent aluminium oxide and indium tin oxide layers on polymer substrates [J].
Henry, BM ;
Erlat, AG ;
McGuigan, A ;
Grovenor, CRM ;
Briggs, GAD ;
Tsukahara, Y ;
Miyamoto, T ;
Noguchi, N ;
Niijima, T .
THIN SOLID FILMS, 2001, 382 (1-2) :194-201
[6]   Electrical properties of crystalline ITO films prepared at room temperature by pulsed laser deposition on plastic substrates [J].
Izumi, H ;
Ishihara, T ;
Yoshioka, H ;
Motoyama, M .
THIN SOLID FILMS, 2002, 411 (01) :32-35
[7]  
KIM WG, 1993, MACROMOLECULES, V28, P371
[8]  
Lim H, 2002, ADV MATER, V14, P1275, DOI 10.1002/1521-4095(20020916)14:18<1275::AID-ADMA1275>3.0.CO
[9]  
2-Y
[10]  
LIM H, 2005, SYNTHETIC METAL, V137, P1017
123