Zone-plate interferometer for measuring the shape error of mirrors with large numerical aperture and steep asphericity

被引：1

作者：

Nomura, T ^{[1
]}

Kamiya, K ^{[1
]}

Miyashiro, H ^{[1
]}

Tashiro, H ^{[1
]}

Yoshikawa, K ^{[1
]}

机构：

[1] TOYAMA UNIV,FAC ENGN,DEPT MECH SYST ENGN,GOFUKU,TOYAMA 3190,JAPAN

来源：

OPTICAL REVIEW | 1996年 / 3卷 / 01期

关键词：

zone-plate interferometer; shape measurement of mirror; on-machine measurement; computer generated hologram; large numerical aperture; aspherical mirror;

D O I：

10.1007/s10043-996-0034-5

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A compact zone-plate interferometer is developed to measure the shape error of concave mirrors. A diffracted light of (0, 0) and that of (-1, -1) or (+1, +1) are used in the interferometer. The interferometer enables us to measure the shape error of mirrors with a large numerical aperture and a steep asphericity. The shape errors of a spherical mirror and a parabolic mirror are measured by the interferometer, and that of the former agrees well with that measured by Fizeau interferometer. Methods for adjustments of zone plates and the mirrors being tested are proposed to perform precise measurements of the mirror shapes.

引用

页码：34 / 37

页数：4

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