Relationship between processing and electrical behavior of BST films deposited by spin coating

被引：4

作者：

Dien, E ^{[1
]}

Briot, JB ^{[1
]}

Lejeune, M ^{[1
]}

Smith, A ^{[1
]}

机构：

[1] Ecole Natl Super Ceram Ind, F-87065 Limoges, France

来源：

JOURNAL OF THE EUROPEAN CERAMIC SOCIETY | 1999年 / 19卷 / 6-7期

关键词：

barium strontium titanates; films; grain size; interface; dielectric properties;

D O I：

10.1016/S0955-2219(98)00432-4

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The present work concerns the preparation of Ba0.67Sr0.33TiO3 ceramic under thin film form, using a chemical route, for infrared detection applications. Dielectric behavior of the deposits as a function of temperature and their structural properties, through electron microscopy investigations, were studied for films prepared with various firing treatments. Relation between the Rapid Thermal Processing (RTP) used, during the firing stage, and the physical characteristics of the obtained layers is discussed. (C) 1999 Elsevier Science Limited. All rights reserved.

引用

页码：1349 / 1352

页数：4

共 4 条

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[2] KULWICKI BM, 1992, P 8 IEEE INT S APPL
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KIM, CY
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KWON, HJ
KIM, KY
LEE, JS
KIM, ST
[J]. JOURNAL OF MATERIALS RESEARCH, 1995, 10 (07) : 1790 - 1794
[4] CRYSTALLOGRAPHIC AND ELECTRICAL-PROPERTIES OF EPITAXIAL BATIO3 FILM GROWN ON CONDUCTIVE AND INSULATING PEROVSKITE OXIDES
WATANABE, Y
MATSUMOTO, Y
KUNITOMO, H
TANAMURA, M
NISHIMOTO, E
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1994, 33 (9B): : 5182 - 5186

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