Kinetic modelling of a discharge-pumped ArF excimer laser and the effects of discharge filamentation

被引:7
作者
Demyanov, AV
Feenstra, L
Peters, PJM
Napartovich, AP
Witteman, WJ
机构
[1] Univ Twente, Fac Appl Phys, Quantum Elect Grp, NL-7500 AE Enschede, Netherlands
[2] Troitsk Inst Innovat & Thermonucl Res, Troitsk 142092, Russia
[3] Vrije Univ Amsterdam, Ctr Laser, Dept Phys & Astron, NL-1081 HV Amsterdam, Netherlands
来源
APPLIED PHYSICS B-LASERS AND OPTICS | 2001年 / 72卷 / 07期
关键词
D O I
10.1007/s003400100538
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Results of kinetic modelling of an X-ray preionised, discharge-pumped ArF excimer laser, operating with a spiker-sustainer circuit are presented. The parallel-resistor model includes the complete ArF laser kinetics and calculations of the Boltzmann equation in each layer taking into account the effects of election-electron and super-elastic collisions. The model further includes a detailed description of the electrical circuit and the formation of filaments with a realistic electrode profile. This model shows a good correspondence with the experimental results in predicting laser energy and optical behaviour. Neglecting the formation of filaments and the electron-electron and super-plastic collision processes yields remarkably poorer results. Parametric studies on the electrode profile, the formation of micro-arcs and on the electrical circuit parameters were performed numerically.
引用
收藏
页码:823 / 833
页数:11
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