Development of stacking faults in strained silicon layers

被引:3
作者
Bedell, SW [1 ]
Reznicek, A [1 ]
Yang, B [1 ]
Hovel, HJ [1 ]
Ott, JA [1 ]
Fogel, K [1 ]
Domenicucci, AG [1 ]
Sadana, DK [1 ]
机构
[1] IBM Corp, Thomas J Watson Res Ctr, Yorktown Hts, NY 10598 USA
来源
2005 IEEE INTERNATIONAL SOI CONFERENCE, PROCEEDINGS | 2005年
关键词
D O I
10.1109/SOI.2005.1563568
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:144 / 145
页数:2
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