Triple-frequency intermittent contact atomic force microscopy characterization: Simultaneous topographical, phase, and frequency shift contrast in ambient air

被引:65
作者
Solares, Santiago D. [1 ]
Chawla, Gaurav [1 ]
机构
[1] Univ Maryland, Dept Mech Engn, College Pk, MD 20742 USA
基金
美国国家科学基金会;
关键词
CAPILLARY FORCE; PROBES; SENSITIVITY; PARTICLES; ADHESION;
D O I
10.1063/1.3475644
中图分类号
O59 [应用物理学];
学科分类号
摘要
We present computational simulation and experimental results of ambient air atomic force microscopy (AFM) characterization with simultaneous excitation and control of three eigenmodes of a rectangular microcantilever beam. Trimodal characterization combining amplitude and frequency modulation is an enhancement of the capabilities of the AFM technique, which could allow the rapid acquisition of topographical, phase, and frequency shift contrast with a single surface scan at normal scan rates. The results suggest that, in general, the phase and frequency shift contrast are affected similarly but in opposite directions by the tip-sample interactions, although deviations from this trend are often observed in the experiments, such that all available sources of contrast could provide complementary information on surface properties. (c) 2010 American Institute of Physics. [doi:10.1063/1.3475644]
引用
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页数:5
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