Detailed comparison between probe density measurements of glow discharge in argon and in helium

In this article we shall look a bit more closely at some of the fundamental plasma parameters obtained by a cylindrical Langmuir probe within low-pressure electrical gas discharge plasma. The presented measurements were made in argon and in helium glow discharge plasmas. We are mainly concerned with the densities of the charged particles (electrons and ions) within the plasma and the effect of the discharge conditions upon them. The electron density is calculated from the electron current at the space potential and from the integration over the EEDF The ion density is calculated by using the OML collisionless theory. The parameterization of Lafraimboise's numerical results is also used for the ion density calculation. In the range of our experimental conditions the results of plasma density, for both gases, tend to show that the ion densities measured with the OML and Laframboise theories exceeds the measured electron densities. The results also show that the plasma electron and ion densities increased with both discharge power and gas pressure. (c) 2005 Elsevier Ltd. All rights reserved.