First-principles calculations of helium and neon desorption from cavities in silicon

被引:9
|
作者
Eddin, A. Charaf [1 ]
Pizzagalli, L. [1 ]
机构
[1] Univ Poitiers, CNRS, Dept Phys & Mech Mat, Inst P,ENSMA UPR 3346,SP2MI, F-86962 Futuroscope, France
关键词
IMPLANTATION; HE; BUBBLES; SI; HYDROGEN; DEFECTS; VOIDS; GAS; TEMPERATURE; PERMEATION;
D O I
10.1088/0953-8984/24/17/175006
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
Combining density functional theory, the nudged elastic band technique, and the ultradense fluid model, we investigated the desorption process of He and Ne in silicon. Our results show that the internal surfaces of gas-filled bubbles are not a limiting factor during desorption experiments, since the surface reconstruction opens diffusion paths easier than in the bulk. We show that the vibrational contribution to the energy of helium in the bulk has to be considered in order to determine realistic pressures in the bubbles, when comparing experiments and simulations. At the maximum of desorption, an average pressure of 1-2 GPa is computed.
引用
收藏
页数:8
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