[1] Guangdong Univ Technol, State Key Lab Precis Elect Mfg Technol & Equipmen, Guangzhou 510006, Peoples R China
[2] Guangdong Univ Technol, Guangdong Prov Key Lab Micronano Mfg Technol & Eq, Guangzhou 510006, Peoples R China
[3] Guangdong Univ Technol, Ultraprecis Mfg Equipment Guangdong Hong Kong Joi, Guangzhou 510006, Peoples R China
[4] Guangdong Univ Technol, Minist Educ, Key Lab Precis Elect Mfg Equipment & Technol, Guangzhou 510006, Peoples R China
[5] Guangdong Univ Technol, Sch Electromech Engn, Guangzhou 510006, Peoples R China
[6] Guangdong Univ Technol, Sch Biomed & Pharmaceut Sci, Guangzhou 510006, Peoples R China
[7] Univ Aucldand, Dept Chem & Mat Engn, Auckland 1142, New Zealand
[8] Nanyang Technol Univ, Sch Mech & Aerosp Engn, 50 Nanyang Ave, Singapore 639798, Singapore
[9] Wuyi Univ, Sch Biotechnol & Hlth Sci, Jiangmen 529020, Peoples R China