Tribomechanical properties of hard Cr-doped DLC coatings deposited by low-frequency HiPIMS

被引：93

作者：

Santiago, J. A. ^{[1
]}

Fernandez-Martinez, I. ^{[2
]}

Sanchez-Lopez, J. C. ^{[3
]}

Rojas, T. C. ^{[3
]}

Wennberg, A. ^{[2
]}

Bellido-Gonzalez, V. ^{[4
]}

Molina-Aldareguia, J. M. ^{[1
]}

Monclus, M. A. ^{[1
]}

Gonzalez-Arrabal, R. ^{[5
,6
]}

机构：

[1] IMDEA Mat Inst, C Eric Kandel 2, Madrid 28906, Spain

[2] Nano4Energy SL, Jose Gutierrez Abascal 2, Madrid 28006, Spain

[3] Univ Seville, CSIC, Inst Ciencia Mat Sevilla, Avda Americo Vespucio 49, Seville 41092, Spain

[4] Gencoa Ltd, 4 Havilland Dr, Liverpol L24 8RN, England

[5] Univ Politecn Madrid, Inst Fus Nucl Guillermo Velarde, Jose Gutierrez Abascal 2, E-28006 Madrid, Spain

[6] UPM, Dept Ingn Energet, ETSII, Jose Gutierrez Abascal 2, Madrid 28006, Spain

来源：

SURFACE & COATINGS TECHNOLOGY | 2020年 / 382卷

关键词：

HiPIMS; Diamond-like carbon (DLC); Hard coatings; Nanostructures; Metal-doped DLC; High-temperature tribology; DIAMOND-LIKE-CARBON; THERMAL-STABILITY; FRICTIONAL BEHAVIOR; BIAS VOLTAGE; FILMS; GRAPHITIZATION; MODULUS; WEAR; EELS;

D O I：

10.1016/j.surfcoat.2019.124899

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Cr-doped diamond-like carbon (Cr-DLC) films with Cr contents ranging from 3 up to 20 at. % were synthesised in a codeposition process with HiPIMS (Cr deposition) and DC-pulsed technology (C deposition). The application of HiPIMS at low frequencies was observed to significantly enhance the energy density during the Cr plasma discharge due to the interaction of Cr-C species. The higher energy bombardment at low HiPIMS frequencies allowed doping with Cr the DLC structure avoiding the graphitization of the carbon structure. EELS spectroscopy was used to evaluate sp(3) content and Raman was used for sp(2) structural characterization of the films. Enhanced mechanical properties (hardness up to 30 GPa) were observed with nanoindentation for Cr-doped DLC at low frequencies. High temperature nanoindentation tests were also performed from room temperature to 425 degrees C in order to evaluate the evolution of hardness and Young Modulus with temperature. The results showed that the mechanical properties at high temperature mainly depend on the initial sp(3)-sp(2) structure. Tribological tests were carried out in air from room temperature to 250 degrees C. Cr-doped DLC coatings deposited by low-frequency HiPIMS showed lower friction and wear compared to undoped DLC.

引用

页数：10

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