Multilayer grating for the Extreme Ultraviolet Spectrometer (EIS)

被引：15
作者：
Seely, JF [1 ]
机构：
[1] USN, Res Lab, Div Space Sci, Washington, DC 20375 USA
来源：
X-RAY OPTICS, INSTRUMENTS, AND MISSIONS IV | 2000年 / 4138卷
关键词：
multilayers; extreme ultraviolet; diffraction grating; grating efficiency;
D O I：
10.1117/12.407557
中图分类号：
V [航空、航天];
学科分类号：
08 ; 0825 ;
摘要：
The design of the multilayer coatings and multilayer grating for the EIS spectrometer is presented. The grating substrate has a rectangular laminar groove profile with 4200 grooves/mm and a 58 Angstrom groove depth. The grating and mirror have two multilayer coatings, each covering half of the areas of the grating and minor, and with high reflectance in the two wavelength regions 170-210 Angstrom and 250-290 Angstrom. The reflectance of the multilayer coating and the efficiency of the multilayer grating were calculated using computer codes that were validated by comparison to reflectance and efficiency measurements performed using synchrotron radiation. The sensitivities of the calculated reflectance and grating efficiency to surface microroughness, layer interdiffusion, layer nonuniformity, illumination angle, grating groove variations, hydrocarbon contamination, and oxide buildup were analyzed.
引用
收藏
页码：174 / 181
页数：8
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