Electrical and optical properties of ZnO transparent conducting films by the sol-gel method

被引:614
作者
Lee, JH [1 ]
Ko, KH [1 ]
Park, BO [1 ]
机构
[1] Kyungpook Natl Univ, Dept Inorgan Mat Engn, Taegu 702701, South Korea
关键词
sol-gel method; oxide; zinc compounds; semiconducting II-VI materials;
D O I
10.1016/S0022-0248(02)01907-3
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
The effect of drying conditions and the first- and second-heat treatment on the structural, electrical and optical properties of ZnO thin films prepared by the sol-gel method was investigated. ZnO films were deposited on silica glass substrates by the spin-coating method. Zinc acetate dihydrate, 2-methoxyethanol and monoethanolamine were used as a starting material, solvent and stabilizer, respectively. ZnO films were dried at 350degreesC and then heated at 600degreesC showed an extremely sharp (0 0 2) peak in the XRD patterns. The more films were oriented preferentially along (0 0 2) direction, the greater their electrical and optical properties became, By applying the second-heat treatment in nitrogen with 5% hydrogen at 500degreesC, the grain size of films was increased, the resistivity value was 0.099 Omega cm and optical transmittances became higher than 85% in the visible range. (C) 2002 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:119 / 125
页数:7
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