Radiation-stimulated photoluminescence in electron irradiated 4H-SiC

被引:22
作者
Lebedev, A. A. [1 ,2 ]
Ber, B. Ya [1 ]
Seredova, N. V. [1 ]
Kazantsev, D. Yu [1 ]
Kozlovski, V. V. [3 ]
机构
[1] Russian Acad Sci, Ioffe Phys Tech Inst, St Petersburg 194021, Russia
[2] Natl Res Univ Informat Technol Mech & Opt, St Petersburg 197101, Russia
[3] St Petersburg State Polytech Univ, St Petersburg 195251, Russia
关键词
4H SiC; electron irradiation; photoluminescence; SIMS; DEEP-LEVEL CENTERS; SILICON-CARBIDE; DEFECT LUMINESCENCE; DIODES;
D O I
10.1088/0022-3727/48/48/485106
中图分类号
O59 [应用物理学];
学科分类号
摘要
The photoluminescence (PL) arising in low doped CVD grown n- and p-type 4H-SiC upon electron irradiation (0,9 MeV) has been studied. After each doze of irradiation spectrum of PL was measured. The PL spectrum was dominated by a band peaked at hv approximate to 2,45 eV, commonly observed upon irradiation of SiC. The experiments demonstrated that, for samples with both types of conduction, the PL intensity approaches a constant value with increasing irradiation dose. A model was suggested, describing the PL characteristics in terms of the radiative recombination via a donor-acceptor pair constituted by nitrogen and a structural defect formed in the course of irradiation. Also, the concentration of nitrogen atoms was measured by the SIMS method. The experimental data were used to calculate in terms of the suggested model the dependence of the PL intensity on the irradiation dose. A good agreement between the calculated and experimental dependences was observed. A conclusion is made that the PL is activated by donor-acceptor pairs constituted by a nitrogen atom and a structural defect.
引用
收藏
页数:5
相关论文
共 21 条
  • [1] ANDREEV AN, 1994, SEMICONDUCTORS+, V28, P430
  • [2] Formation of carbon vacancy in 4H silicon carbide during high-temperature processing
    Ayedh, H. M.
    Bobal, V.
    Nipoti, R.
    Hallen, A.
    Svensson, B. G.
    [J]. JOURNAL OF APPLIED PHYSICS, 2014, 115 (01)
  • [3] GUSEV VM, 1981, SOV PHYS SEMICOND+, V15, P1413
  • [4] EPR Identification of Defects and Impurities in SiC: To be decisive
    Isoya, J.
    Umeda, T.
    Mizuochi, N.
    Son, N. T.
    Janzen, E.
    Ohshima, T.
    [J]. SILICON CARBIDE AND RELATED MATERIALS 2007, PTS 1 AND 2, 2009, 600-603 : 279 - +
  • [5] Point Defects in Silicon Carbide
    Iwamoto, Naoya
    Svensson, Bengt G.
    [J]. DEFECTS IN SEMICONDUCTORS, 2015, 91 : 369 - 407
  • [6] KODRAU NV, 1981, SOV PHYS SEMICOND+, V15, P813
  • [7] Kozlovski V., 2005, RAD DEFECT ENG SELEC, V37
  • [8] Effect of irradiation with MeV protons and electrons on the conductivity compensation and photoluminescence of moderately doped p-4H-SiC (CVD)
    Kozlovski, V. V.
    Lebedev, A. A.
    Bogdanova, E. V.
    Seredova, N. V.
    [J]. SEMICONDUCTORS, 2015, 49 (09) : 1163 - 1165
  • [9] Model for conductivity compensation of moderately doped n- and p-4H-SiC by high-energy electron bombardment
    Kozlovski, V. V.
    Lebedev, A. A.
    Bogdanova, E. V.
    [J]. JOURNAL OF APPLIED PHYSICS, 2015, 117 (15)
  • [10] Irradiation of sublimation-grown p-SiC with 0.9-MeV electrons
    Lebedev, A. A.
    Kozlovski, V. V.
    [J]. TECHNICAL PHYSICS LETTERS, 2014, 40 (08) : 651 - 652