A step-by-step guide to perform x-ray photoelectron spectroscopy

被引:620
作者
Greczynski, Grzegorz [1 ]
Hultman, Lars [1 ]
机构
[1] Linkoping Univ, Dept Phys Chem & Biol IFM, Thin Film Phys Division, SE-58183 Linkoping, Sweden
基金
瑞典研究理事会;
关键词
AUGER-ELECTRON-SPECTROSCOPY; HIGH-TEMPERATURE OXIDATION; CHEMICAL-STATE PLOTS; CORE-LEVEL SPECTRA; THIN-FILMS; ENERGY CALIBRATION; BINDING-ENERGY; ADVENTITIOUS CARBON; ELEMENTAL SOLIDS; WORK-FUNCTION;
D O I
10.1063/5.0086359
中图分类号
O59 [应用物理学];
学科分类号
摘要
There is a growing concern within the surface science community that the massive increase in the number of XPS articles over the last few decades is accompanied by a decrease in work quality including in many cases meaningless chemical bond assignment. Should this trend continue, it would have disastrous consequences for scientific research. While there are many factors responsible for this situation, the lack of insight of physical principles combined with seeming ease of XPS operation and insufficient training are certainly the major ones. To counter that, we offer a comprehensive tutorial written in the form of a step-by-step guide starting from experimental planning, through sample selection and handling, instrument setup, data acquisition, spectra analysis, and results presentation. Six application examples highlight the broad range of research questions that can be answered by XPS. The topic selection and the discussion level are intended to be accessible for novices yet challenging possible preconceptions of experienced practitioners. The analyses of thin film samples are chosen for model cases as this is from where the bulk of XPS reports presently emanate and also where the author's key expertise lies. At the same time, the majority of discussed topics is applicable to surface science in general and is, thus, of relevance for the analyses of any type of sample and material class. The tutorial contains ca. 160 original spectra and over 290 references for further reading. Particular attention is paid to the correct workflow, development of good research practices, and solid knowledge of factors that impact the quality and reliability of the obtained information. What matters in the end is that the conclusions from the analysis can be trusted. Our aspiration is that after reading this tutorial each practitioner will be able to perform error-free data analysis and draw meaningful insights from the rich well of XPS. Published under an exclusive license by AIP Publishing.
引用
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页数:53
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