On-chip methane sensing by near-IR absorption signatures in a photonic crystal slot waveguide

被引：191

作者：

Lai, Wei-Cheng ^{[2
]}

Chakravarty, Swapnajit ^{[1
]}

Wang, Xiaolong ^{[1
]}

Lin, Cheyun ^{[2
]}

Chen, Ray T. ^{[2
]}

机构：

[1] Omega Opt Inc, Austin, TX 78759 USA

[2] Univ Texas Austin, Dept Elect & Comp Engn, Austin, TX 78712 USA

来源：

OPTICS LETTERS | 2011年 / 36卷 / 06期

关键词：

GAS-DETECTION; SPECTROSCOPY; MICROCAVITIES;

D O I：

10.1364/OL.36.000984

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We demonstrate a 300 mu m long silicon photonic crystal (PC) slot waveguide device for on-chip near-infrared absorption spectroscopy, based on the Beer-Lambert law for the detection of methane gas. The device combines slow light in a PC waveguide with high electric field intensity in a low-index 90 nm wide slot, which effectively increases the optical absorption path length. A methane concentration of 100 ppm (parts per million) in nitrogen was measured. (C) 2011 Optical Society of America

引用

收藏

页码：984 / 986

页数：3

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