A high precision displacement sensor using a low-finesse fiber-optic Fabry-Perot interferometer

被引：52

作者：

Wang, TY ^{[1
]}

Zheng, SX ^{[1
]}

Yang, ZG ^{[1
]}

机构：

[1] Yanshan Univ, Dept Comp & Informat Sci, Qinhuangdao 066004, Hebei, Peoples R China

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1998年 / 69卷 / 02期

基金：

中国国家自然科学基金;

关键词：

displacement sensor; interferometer; resolution;

D O I：

10.1016/S0924-4247(98)00075-2

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A low-finesse fiber-optic Fabry-Perot interferometer displacement sensor has been developed and tested. The sensor consists of a single-mode fiber-optic interferometer and a high performance signal processing system. The displacement resolution of the sensor is 0.005 nm, the accuracies are 0.05 nm over dynamic range 0.005-79.1 nm and 0.5 nm over dynamic range 79.1-3200 nm, respectively. (C) 1998 Elsevier Science S.A. All rights reserved.

引用

页码：134 / 138

页数：5

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