Fabrication of micro-optic elements by the sol-gel method

被引：11

作者：

Shinmou, K ^{[1
]}

Nakama, K ^{[1
]}

Koyama, T ^{[1
]}

机构：

[1] Nippon Sheet Glass Co Ltd, Tsukuba, Ibaraki 3002635, Japan

来源：

JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY | 2000年 / 19卷 / 1-3期

关键词：

micro-optics; micro-lens; organic-inorganic material; thick film;

D O I：

10.1023/A:1008756826711

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Micro-lens arrays composed of organic-inorganic materials were molded on glass substrates by the sol-gel method. Each lens had the same focal length and accurate pitch. There was no change in appearance or focal length after heat treatment at 350 degreesC. The arrays had a refractive index of 1.53 (@1550 nm) and a transmittance of 98%/mm (@1550 nm). The film material did not change in appearance during evaluation for acid resistance.

引用

页码：267 / 269

页数：3

共 8 条

[1]

BORRELLI NF, MICROOPTICS TECHNOLO, pCH1

[2]

Matsuda A, 1998, J AM CERAM SOC, V81, P2849, DOI 10.1111/j.1151-2916.1998.tb02705.x

[3] PHYSICAL AND CHEMICAL-PROPERTIES OF TITANIA SILICA FILMS DERIVED FROM POLY(ETHYLENE GLYCOL)-CONTAINING GELS [J].

MATSUDA, A ;

MATSUNO, Y ;

KATAYAMA, S ;

TSUNO, T ;

TOHGE, N ;

MINAMI, T .

JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1990, 73 (08) :2217-2221

[4]

MATSUDA A, 1990, SPIE, V1328, P71

[5]

MATSUDA A, 2000, SPIE, V1328, P62

[6]

MITSUHASHI Y, 1992, SPIE P, V1758, P105

[7]

SHINMO K, 1998, ANN M CER SOC JAP CE, P377

[8]

TOHGE N, 1988, NIPPON SERAM KYO GAK, V96, P1127

← 1 →