Nb3Sn thin films made by RF magnetron sputtering process with a reacted Nb3Sn powder target

被引：7

作者：

Agatsuma, K ^{[1
]}

Tateishi, H ^{[1
]}

Arai, K ^{[1
]}

Saitoh, T ^{[1
]}

Nakagawa, M ^{[1
]}

机构：

[1] FUJIKURA LTD,KOTOU KU,TOKYO 135,JAPAN

来源：

IEEE TRANSACTIONS ON MAGNETICS | 1996年 / 32卷 / 04期

关键词：

D O I：

10.1109/20.511488

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We have developed a high field pulsed superconductor with a high elastic modulus fiber for reinforcement called FRS (Fiber Reinforced Superconductor). These fiber reinforced superconductors will be formed by magnetron sputtering techniques of two opposed planar targets in future. In this process for Nb3Sn compound a single phase material target would be desired to be developed to shorten the deposition process. We have succeeded to make a sputtering target which consists of Nb3Sn single phase material by powder metallurgy. Fiber reinforced superconductor of Nb3Sn on Ta fiber has been successfully fabricated with this target. The Nb3Sn film as grown on a heated substrate has been attempted to form by this single phase target.

引用

页码：2925 / 2928

页数：4

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