The research of effects of brittle single crystal material's anisotropy on the diamond turned surface quality

被引：1

作者：

Zhao, QL ^{[1
]}

Dong, S ^{[1
]}

Zhao, T ^{[1
]}

机构：

[1] Harbin Inst Technol, Precis Engn Res Inst, Harbin 150001, Peoples R China

来源：

ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGY 2000 | 2000年 / 4231卷

关键词：

brittle single crystal material; anisotropy; diamond turning; atomic force microscope;

D O I：

10.1117/12.402805

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Based on the anisotropy of granular structure, the reasonable criterion was given to understand the generation of the prior cleavage or slip for each cleavage system or slip system. The phenomenon that the roughness of the diamond turned single crystal material's surface distributes in scallop is explained, and a turning method is presented to eliminate the scallop distribution. Beside this, the AFM was used to observe the micro-topography of the light and shade area of brittle single crystal material's diamond turned surface. The criterion is in good agreement with the observed results.

引用

页码：231 / 240

页数：10