Development of a novel gas sensor based on oxide thick films

被引:170
作者
Arshak, K [1 ]
Gaidan, I [1 ]
机构
[1] Univ Limerick, Dept Elect & Comp Engn, Microelect & Semicond Res Grp, Limerick, Ireland
来源
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY | 2005年 / 118卷 / 1-3期
关键词
gas sensor; thick films; ZnO and ZnFe2O4;
D O I
10.1016/j.mseb.2004.12.061
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Zinc and iron oxide thick film gas sensors were fabricated using screen-printing technology on glass substrates that had silver interdigitated electrodes. The sensor was used to detect methanol, ethanol and propanol with a concentration range of 0-8000ppm. Using the formula to calculate a change in resistance, Delta R = R-gas - R-air. resistance was seen to increase linearly alongside increasing concentrations of the gas vapours. The sensor showed the highest sensitivity to propanol followed by ethanol and methanol when the operating temperature was 25 degrees C. The sensitivities (slope of graphs) of methanol, ethanol and propanol changed from 0.07, 0.5, and 3.54 to 0.075, 0.115, and 0.5 ohm/ppm when the operating temperature was increased from 25 to 50 degrees C. The response/recovery times of the sensor for 4000 ppm at room temperature were, 10/10, 15/20 and 40/70 s for methanol, ethanol and propanol, respectively. X-ray diffraction (XRD) was used to examine the final composition of the film, while scanning electron microscopy (SEM) was used to examine the final composition of grain size. The final composition has two phases: ZnO and ZnFeO4. (c) 2004 Elsevier B.V. All rights reserved.
引用
收藏
页码:44 / 49
页数:6
相关论文
共 32 条
[1]   Effect of processing on the properties of tin oxide-based thick-film gas sensors [J].
Ahmad, A ;
Walsh, J ;
Wheat, TA .
SENSORS AND ACTUATORS B-CHEMICAL, 2003, 93 (1-3) :538-545
[2]  
ARSHAK K, 2003, P INT S MICR C
[3]   A ceramic thick film humidity sensor based on MnZn ferrite [J].
Arshaka, K ;
Twomey, K ;
Egan, D .
SENSORS, 2002, 2 (02) :50-61
[4]   NO2 response of In2O3 thin film gas sensors prepared by sol-gel and vacuum thermal evaporation techniques [J].
Cantalini, C ;
Wlodarski, W ;
Sun, HT ;
Atashbar, MZ ;
Passacantando, M ;
Santucci, S .
SENSORS AND ACTUATORS B-CHEMICAL, 2000, 65 (1-3) :101-104
[5]   Gas-sensitive electrical properties of perovskite-type SmFeO3 thick films [J].
Carotta, MC ;
Martinelli, G ;
Sadaoka, Y ;
Nunziante, P ;
Traversa, E .
SENSORS AND ACTUATORS B-CHEMICAL, 1998, 48 (1-3) :270-276
[6]   Sensing properties of SnO2-Co3O4 composites to CO and H2 [J].
Choi, US ;
Sakai, G ;
Shimanoe, K ;
Yamazoe, N .
SENSORS AND ACTUATORS B-CHEMICAL, 2004, 98 (2-3) :166-173
[7]   Sol-gel TiO2 and W/TiO2 nanostructured thin films for control of drunken driving [J].
Garzella, C ;
Comini, E ;
Bontempi, E ;
Depero, LE ;
Frigeri, C ;
Sberveglieri, G .
SENSORS AND ACTUATORS B-CHEMICAL, 2002, 83 (1-3) :230-237
[8]   TiO2 thin films by a novel sol-gel processing for gas sensor applications [J].
Garzella, C ;
Comini, E ;
Tempesti, E ;
Frigeri, C ;
Sberveglieri, G .
SENSORS AND ACTUATORS B-CHEMICAL, 2000, 68 (1-3) :189-196
[9]   The electrical response of evaporated cobalt phthalocyanine thin films on exposure to NO2 [J].
Gould, RD ;
Ibrahim, NA .
THIN SOLID FILMS, 2001, 398 :432-437
[10]   Gas sensing through thick film technology [J].
Guidi, V ;
Butturi, MA ;
Carotta, MC ;
Cavicchi, B ;
Ferroni, M ;
Malagù, C ;
Martinelli, G ;
Vincenzi, D ;
Sacerdoti, M ;
Zen, M .
SENSORS AND ACTUATORS B-CHEMICAL, 2002, 84 (01) :72-77