Pneumatically driven peristaltic micropumps utilizing serpentine-shape channels

被引:100
作者
Wang, CH [1 ]
Lee, GB [1 ]
机构
[1] Natl Cheng Kung Univ, Dept Engn Sci, Tainan 701, Taiwan
关键词
D O I
10.1088/0960-1317/16/2/019
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This study presents a novel pneumatic micropump featuring a serpentine-shape (S-shape) microchannel. Fluid is driven through the device by the hydrodynamic pressure generated by the peristaltic action of membranes located at the intersections of the fluidic microchannel and the S-shape microchannel. The pneumatic micropump is fabricated in PDMS (polydimethylsiloxane) using MEMS (micro-electro-mechanical-systems)-based techniques. The micropump provides an improved pumping rate and is controlled using a single electromagnetic valve (EMV) switch. The experimental results reveal that the pumping rate can be increased by increasing the operational frequency of the EMV, the pressure of the externally supplied compressed air or the number of membranes. As the compressed air travels along the S-shape microchannel, it causes the membranes to deflect. The time-phased deflection of successive membranes along the microchannel length generates a peristaltic effect which drives the fluid along the microfluidic channel. The maximum attainable pumping rate is influenced by the time interval between the deflections of adjacent membranes, and is therefore affected by the geometric characteristics of the serpentine microchannel. The back pressure of the serpentine-shape micropump is measured at a fixed peak frequency to prove its ability to overcome the fluidic resistance. The optimum operating conditions and geometric parameters of the micropump are verified experimentally. It is found that the maximum pumping rate is 7.43 mu l min(-1) and is provided by a micropump with seven membranes actuated by 20 psi air pressure and 9 Hz operational frequency.
引用
收藏
页码:341 / 348
页数:8
相关论文
共 30 条
[1]   Consecutive microcontact printing -: ligands for asymmetric catalysis in silicon channels [J].
Andersson, H ;
Jönsson, C ;
Moberg, C ;
Stemme, G .
SENSORS AND ACTUATORS B-CHEMICAL, 2001, 79 (01) :78-84
[2]   SILICON MICROMECHANICAL DEVICES [J].
ANGELL, JB ;
TERRY, SC ;
BARTH, PW .
SCIENTIFIC AMERICAN, 1983, 248 (04) :44-&
[3]   Micro total analysis systems. 2. Analytical standard operations and applications [J].
Auroux, PA ;
Iossifidis, D ;
Reyes, DR ;
Manz, A .
ANALYTICAL CHEMISTRY, 2002, 74 (12) :2637-2652
[4]  
BAO M, 1996, SENSOR ACTUAT A-PHYS, V50, P135
[5]  
Chiem NH, 1998, CLIN CHEM, V44, P591
[6]   Microfabricated centrifugal microfluidic systems: Characterization and multiple enzymatic assays [J].
Duffy, DC ;
Gillis, HL ;
Lin, J ;
Sheppard, NF ;
Kellogg, GJ .
ANALYTICAL CHEMISTRY, 1999, 71 (20) :4669-4678
[7]   Micropump based on PZT unimorph and one-way parylene valves [J].
Feng, GH ;
Kim, ES .
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2004, 14 (04) :429-435
[8]   A continuum model for size-dependent deformation of elastic films of nano-scale thickness [J].
He, LH ;
Lim, CW ;
Wu, BS .
INTERNATIONAL JOURNAL OF SOLIDS AND STRUCTURES, 2004, 41 (3-4) :847-857
[9]  
JALN KK, 2000, TRENDS BIOTECHNOL, V18, P278
[10]   Fabrication and test of a thermopneumatic micropump with a corrugated p plus diaphragm [J].
Jeong, OC ;
Yang, SS .
SENSORS AND ACTUATORS A-PHYSICAL, 2000, 83 (1-3) :249-255