Electrostatic-Pneumatic MEMS deformable mirror for focus control

被引：0

作者：

Moghimi, Mohammad J. ^{[1
]}

Wilson, Chris ^{[2
]}

Dickensheets, David L. ^{[1
]}

机构：

[1] Montana State Univ, Elect & Comp Engn Dept, Bozeman, MT 59717 USA

[2] Bridger Photon Inc, Bozeman, MT USA

来源：

2012 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN) | 2012年

基金：

美国国家科学基金会;

关键词：

MEMS Deformable Mirrors; pneumatic actuation; electrostatic actuation; SU-8;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A novel actuation scheme for MEMS deformable mirrors is presented in this paper. In this method electrostatic actuation is combined with pneumatic actuation to achieve either concave or convex surface curvature and to increase the optical focus range of the mirrors. The fabricated device consists of two membranes made of the photoset epoxy SU-8. One membrane serves as the deformable mirror and the other one as the pneumatic actuator. The principle of the operation, fabrication process and deflection curves are presented.

引用

页码：132 / +

页数：2