Measurement of Thermal Conductivity of Thin and Thick Films by Steady-state Heat Conduction

被引:0
作者
Shrestha, R. [1 ]
Choi, T. Y. [1 ]
Chang, W. S. [2 ]
机构
[1] Univ N Texas, Dept Mech & Energy Engn, 3940 N Elm St, Denton, TX 76203 USA
[2] Korea Inst Machinery & Materials, Daejeon, South Korea
来源
2012 28TH ANNUAL IEEE SEMICONDUCTOR THERMAL MEASUREMENT AND MANAGEMENT SYMPOSIUM (SEMI-THERM) | 2012年
关键词
Thermal conductivity; CNT films; micropipette; THERMOCOUPLE;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper describes novel glass micropipette thermal sensor fabricated in a cost-effective manner and thermal conductivity measurement of carbon nanotubes (CNT) thin film using the developed sensor. Various micrometer-sized sensors, which range from 2 mu m to 30 mu m, were produced and tested. The capability of the sensor in measuring thermal fluctuation at micro level with an accuracy of +/- 0.01 degrees C is demonstrated. We have obtained reproducible thermal conductivity data using various micropipette temperature sensors. The average thermal conductivity of the CNT film at room temperature was determined at 73.4 W/m degrees C.
引用
收藏
页码:157 / 161
页数:5
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