In situ lift-out: Steps to improve yield and a comparison with other FIB TEM sample preparation techniques

被引：95

作者：

Langford, R. M. ^{[1
]}

Rogers, M. ^{[2
,3
]}

机构：

[1] Univ Manchester, Ctr Mat Sci, Manchester M1 7HS, Lancs, England

[2] Graz Univ Technol, Inst Electron Microscopy, A-8010 Graz, Austria

[3] Austriamicrosyst AG, A-8141 Unterpremstatten, Unterpremstatte, Austria

来源：

MICRON | 2008年 / 39卷 / 08期

关键词：

FIB; In situ lift-out; TEM;

D O I：

10.1016/j.micron.2008.02.006

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

Steps to improve the success yield of the in situ lift-out technique are presented. These include tapping the plinth of the system and monitoring the grounding current to check the lift-out needle is fixed to the material being removed. In addition, the relative success yields and the time to prepare a TEM lamella for the three main FIB methods are discussed and compared. (C) 2008 Elsevier Ltd. All rights reserved.

引用

页码：1325 / 1330

页数：6

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