Tribological properties of graded diamond-like carbon films on Ti ion-implanted aluminum substrate

被引：20

作者：

Xu, Ming ^{[1
,2
]}

Cai, Xun ^{[2
]}

Liu, Yourning ^{[1
,2
]}

Pu, Shihao ^{[1
,3
]}

Chu, Paul K. ^{[1
]}

机构：

[1] City Univ Hong Kong, Dept Phys & Mat Sci, Kowloon, Hong Kong, Peoples R China

[2] Shanghai Jiao Tong Univ, Sch Mat Sci & Engn, Shanghai 200030, Peoples R China

[3] SW Inst Phys, Chengdu 610041, Sichuan, Peoples R China

来源：

关键词：

Diamond-like carbon; Al substrate; Ti pre-implantation; Graded films; Scratch;

D O I：

10.1016/j.diamond.2007.12.025

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Titanium ions are implanted into the aluminum substrate prior to deposition of the Ti interlayer and DLC graded film produced by magnetron sputtering in order to enhance the structural continuity between the soft substrate and graded DLC film. The Ti-implanted substrate not only strengthens loading support but also improves adhesion with the overlying film. The total thickness of the functionally graded film on the Al substrate reaches over 10 pm and it has a hardness value of similar to 11 GPa. The graphitic network in DLC film helps to reduce the friction coefficient while the graded design disperses the stress during wear and loading. (C) 2007 Elsevier B.V. All rights reserved.

引用

页码：1844 / 1849

页数：6

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