Dynamic Analysis of Cracked Cantilever, Electrostatic Microactuators Using Radial Basis Functions

被引：4

作者：

Hsu, Ming-Hung ^{[1
]}

机构：

[1] Natl Penghu Univ Sci & Technol, Dept Elect Engn, Magong, Penghu, Taiwan

来源：

MATHEMATICAL PROBLEMS IN ENGINEERING | 2012年 / 2012卷

关键词：

DATA APPROXIMATION SCHEME; MEMS; RANGE; MULTIQUADRICS; SIMULATION; CAPACITORS; BEAM; CHIP;

D O I：

10.1155/2012/865461

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The dynamic problems of a microactuator with a single edge crack are numerically formulated using radial basis functions. The microactuator model incorporates the taper ratio, electrode shapes, and crack length, all of which govern the dynamic behavior of microactuators. To optimize the design of a microactuator, many characteristics of various shaped cantilevers and curved electrodes are also investigated.

引用

页数：11

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